Wafer Packing & Unpacking

FUNCTION:

Realize Wafer turnover between Cassette, Canister and Canister.

PARAMETERS:

◆ OCR code reader.

◆ Wafer detection was carried out in Cassette.

◆ Can detect whether the paper, wafer, and greater than 1mm damage.

◆ The height sensor determines the wafer or paper height for precise material removal and placement.

◆ Wafer size: 4-8 inch wafer.

◆ Cassette to cassette 150wafers.

◆ Cassette <> canister 90wafers.

◆ Canister <> canister 70wafers.

APPLICATION:

Loading and unloading of 4-8 inch Wafer, repacking, etc.